Measurable sample size φ300x10
Four probe method test
Automatic navigation
With X-Y-Z moving mechanism
It can measure the sheet resistance of the diaphragm or the thickness of the metal film, and output the square resistance or resistivity distribution
Detection speed: 2 points/s
The maximum number of points is 20000 points
Position accuracy: 0.005mm
Can measure silicon wafer, conductive film square resistance, etc.